ISO 14644-3:2005 PDF Download
Standard EN SampleCleanrooms and associated controlled environments — Part 3: Test methods
Also Known As:
SKU915126639
Published by
International Organization for Standardization
ISO
Publication Date2005-12
Pages CountPages72
ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.
ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.
Details
History and complementary documents
History
Edition | 1 |
ICS Codes | 13.040.35 - Cleanrooms and associated controlled environments |
Language(s) | English |
File Size | 1.4 MB |
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